- Ott, J., Pasanen, T. P., Gädda, A., Garín, M., Rosta, K., Vähänissi, V., i Savin, H. (2020). Impact of doping and silicon substrate resistivity on the blistering of atomic-layer-deposited aluminium oxide. Applied Surface Science, 522. doi: 10.1016/j.apsusc.2020.146400
Impact of doping and silicon substrate resistivity on the blistering of atomic-layer-deposited aluminium oxide
on 18 de maig de 2020
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